Getter Films for Small Vacuum Chambers
Konstantin A. Chuntonov and Sergey P. Yatsenko
Pages 29-39 (11)
This patent review analyzes the state of the developments related to getter films intended for vacuum opto- and
microelectronics. With current production technology, high hermiticity of the packages and high sorption efficiency of the
getter films cannot be achieved simultaneously. A new classification of getter films is suggested in this paper, prompting a
new approach to the problems associated with vacuum for small sealed-off chambers. An acceptable price-reliability ratio
of vacuum devices can be obtained by combining low temperature (not higher than 150°C) sealing methods with reactive
getter films that have high sorption capacity.
Classification of getters, getter reactive films, low temperature sealing, MEMS, microelectronic packages, vacuum, Getter Films, Film Structure, Vacuum Device, Barium Micro-Dispenser
Yael str. 30/16, Nesher 36690, Israel, Complete affiliation: Nanoshell Consulting.