Generic placeholder image

Micro and Nanosystems


ISSN (Print): 1876-4029
ISSN (Online): 1876-4037

Research Article

The Thermal Time Constant of an Electrothermal Microcantilever Resonator

Author(s): Musaab Zarog*

Volume 15, Issue 2, 2023

Published on: 30 August, 2022

Page: [102 - 107] Pages: 6

DOI: 10.2174/1876402914666220622104104

Price: $65


Background: The thermal time constant is the core parameter for determining the dynamic response of the electrothermal actuators and the corresponding maximum operational frequency.

Aim: Since it is necessary to determine how the thermal actuation occurs within the cantilever, this paper presents two models for the thermal time constant of bimetal microcantilevers. One model is based on the bimetallic effect, and the second is based on temperature gradients in layers.

Methods: In order to investigate and check the validity of the two proposed models, the device was actuated electrothermally, and the thermal time response was estimated. A driving voltage was applied to the platinum electrode. The first model is based on the interface thermal resistance between the base and the top electrode layer. The second model assumes that the temperature gradients within the base layer are responsible for thermal actuation.

Results: The microcantilever was excited electrothermally with a resonance frequency of 1.89 MHz. The bimetallic effect was found to be less able to stimulate the microcantilever at this resonance frequency. Therefore, it was concluded that thermal actuation occurred as a result of temperature variation within the SiC base layer.

Conclusion: The results also indicated that temperature variations within one of the two materials in contact might be responsible for thermal actuation, especially if the material has high thermal conductivity.

Keywords: MEMS, resonance frequency, microactuators, thermal actuation, heat transfer, thermal contact resistance.

Next »
Graphical Abstract
Mirza, A.; Hamid, N.H.; Md Khir, M.H.; Ashraf, K.; Jan, M.T.; Riaz, K. Design, modeling and simulation of CMOS-MEMS piezoresistive cantilever based carbon dioxide gas sensor for capnometry. Adv. Mat. Res., 2011, 403(408), 3769-3774.
Hassan, M. Electrostatically actuated 3C-SiC MEMS for frequency mixing. J. Mech., 2012, 1(1), 21-24.
Debeda, H.; Santawitee, O.; Klinthongchai, Y.; Phongphut, A.; Inpor, K.; Chayasombat, B.; Prichanont, S.; Thanachayanont, C. Humidity responses of resonant piezoelectric ceramic cantilever: A comparison between uncoated and mesocellular foam silica-coated sensors. ECS Meeting Abstracts, MA2021-01(59), 2021, p. 1596-1596.
Hassan, M. Pt/3C-SiC electrothermal cantilever for MEMS-based mixers. Microsyst. Technol., 2011, 17(3), 425-428.
Ulkir, O. Design and fabrication of an electrothermal MEMS micro-actuator with 3D printing technology. Mater. Res. Express, 2020, 7(7), 075015.
Gary, K. Self-assembling MEMS devices having thermal actuation. United States Patent US7749792B2, 2010.
Lin, L.; Chiao, M. Electrothermal responses of lineshape microstructures. Sens. Actuators A Phys., 1996, 55(1), 35-41.
Huang, Q.A.; Lee, N.K.S. Analysis and design of polysilicon thermal flexure actuator. J. Micromech. Microeng., 1999, 9(1), 64-70.
Mayyas, M.; Stephanou, H. Electrothermoelastic modeling of MEMS gripper. Microsyst. Technol., 2009, 15(4), 637-646.
Sehr, H.; Tomlin, I.S.; Huang, B.; Beeby, S.P.; Evans, A.G.R.; Brunnschweiler, A.; Ensell, G.J.; Schabmueller, C.G.J.; Niblock, T.E.G. Time constant and lateral resonances of thermal vertical bimorph actuators. J. Micromech. Microeng., 2002, 12(4), 410-413.
Hickey, R.; Sameoto, D.; Hubbard, T.; Kujath, M. Time and frequency response of two-arm micromachined thermal actuators. J. Micromech. Microeng., 2003, 13(1), 40-46.
Zhou, L.; Zhang, X.; Xie, H. An Electrothermal Cu/W bimorph tiptilt-piston MEMS mirror with high reliability. Micromachines, (Basel), 2019, 10(5), 323.
Jiang, L.; Cheung, R.; Hedley, J.; Hassan, M.; Harris, A.J.; Burdess, J.S.; Mehregany, M.; Zorman, C.A. SiC cantilever resonators with electrothermal actuation. Sens. Actuators A Phys., 2006, 128(2), 376-386.
Sahu, B.; Taylor, C.R.; Leang, K.K. Emerging challenges of microactuators for nanoscale positioning, assembly, and manipulation. J. Manuf. Sci. Eng., 2010, 132(3), 030917.
Jeong, T.; Zhu, J.G.; Mao, S.; Pan, T.; Tang, Y.J. Thermal characterization of SiC amorphous thin films. Int. J. Thermophys., 2012, 33(6), 1000-1012.

Rights & Permissions Print Cite
© 2024 Bentham Science Publishers | Privacy Policy