Solid State & Microelectronics Technology

Silicon

Author(s): Sunipa Roy*, Chandan Kumar Ghosh*, Sayan Dey* and Abhijit Kumar Pal * .

Pp: 280-301 (22)

DOI: 10.2174/9789815079876123010008

* (Excluding Mailing and Handling)

Abstract

This chapter introduces silicon as an electronic material for microelectronic device fabrication. It discusses, in-depth, the various aspects of crystalline silicon, wafer manufacturing and their identification techniques. Finally, the various steps involved in a microfabrication process are also discussed. From this chapter, the readers are expected to learn how to process a silicon wafer successfully and proceed with customized device fabrication. 


Keywords: Silicon, Microfabrication, Crystal, Miller indices, Ingot, Wafers.

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